------------------------------------------------------------------------------ MSDS for TETRAMETHYLSILANE Page 1 ------------------------------------------------------------------------------ ------------------------------------------------------------------------------ 1 - PRODUCT IDENTIFICATION ------------------------------------------------------------------------------ PRODUCT NAME: TETRAMETHYLSILANE FORMULA: (CH3)4SI FORMULA WT: 88.23 CAS NO.: 00075-76-3 NIOSH/RTECS NO.: VV5705400 COMMON SYNONYMS: TETRAMETHYL SILICANE PRODUCT CODES: V699 EFFECTIVE: 03/18/87 REVISION #02 PRECAUTIONARY LABELLING BAKER SAF-T-DATA(TM) SYSTEM HEALTH - 2 MODERATE FLAMMABILITY - 4 EXTREME (FLAMMABLE) REACTIVITY - 1 SLIGHT CONTACT - 2 MODERATE HAZARD RATINGS ARE 0 TO 4 (0 = NO HAZARD; 4 = EXTREME HAZARD). LABORATORY PROTECTIVE EQUIPMENT GOGGLES; LAB COAT; VENT HOOD; PROPER GLOVES; CLASS B EXTINGUISHER PRECAUTIONARY LABEL STATEMENTS DANGER CAUSES IRRITATION EXTREMELY FLAMMABLE HARMFUL IF INHALED KEEP AWAY FROM HEAT, SPARKS, FLAME. DO NOT GET IN EYES, ON SKIN, ON CLOTHING. AVOID BREATHING VAPOR. KEEP IN TIGHTLY CLOSED CONTAINER. USE WITH ADEQUATE VENTILATION. WASH THOROUGHLY AFTER HANDLING. IN CASE OF FIRE, USE ALCOHOL FOAM, DRY CHEMICAL, CARBON DIOXIDE - WATER MAY BE INEFFECTIVE. FLUSH SPILL AREA WITH WATER SPRAY. SAF-T-DATA(TM) STORAGE COLOR CODE: RED (FLAMMABLE) ------------------------------------------------------------------------------ 2 - HAZARDOUS COMPONENTS ------------------------------------------------------------------------------ COMPONENT % CAS NO. TETRAMETHYLSILANE 90-100 75-76-3 ------------------------------------------------------------------------------ 3 - PHYSICAL DATA ------------------------------------------------------------------------------ BOILING POINT: 23 C ( 73 F) VAPOR PRESSURE(MM HG): 589 ------------------------------------------------------------------------------ MSDS for TETRAMETHYLSILANE Page 2 ------------------------------------------------------------------------------ MELTING POINT: N/A VAPOR DENSITY(AIR=1): 3 SPECIFIC GRAVITY: 0.65 EVAPORATION RATE: N/A (H2O=1) (BUTYL ACETATE=1) SOLUBILITY(H2O): NEGLIGIBLE (LESS THAN 0.1 %) % VOLATILES BY VOLUME: 100 APPEARANCE & ODOR: CLEAR, COLORLESS LIQUID WITH A SLIGHT HYDROCARBON-LIKE ODOR. ------------------------------------------------------------------------------ 4 - FIRE AND EXPLOSION HAZARD DATA ------------------------------------------------------------------------------ FLASH POINT (OPEN CUP -28 C ( -18 F) FLAMMABLE LIMITS: UPPER - N/A % LOWER - N/A % FIRE EXTINGUISHING MEDIA USE ALCOHOL FOAM, DRY CHEMICAL OR CARBON DIOXIDE. (WATER MAY BE INEFFECTIVE.) SPECIAL FIRE-FIGHTING PROCEDURES FIREFIGHTERS SHOULD WEAR PROPER PROTECTIVE EQUIPMENT AND SELF-CONTAINED BREATHING APPARATUS WITH FULL FACEPIECE OPERATED IN POSITIVE PRESSURE MODE. MOVE CONTAINERS FROM FIRE AREA IF IT CAN BE DONE WITHOUT RISK. USE WATER TO KEEP FIRE-EXPOSED CONTAINERS COOL. UNUSUAL FIRE & EXPLOSION HAZARDS VAPORS MAY FLOW ALONG SURFACES TO DISTANT IGNITION SOURCES AND FLASH BACK. CLOSED CONTAINERS EXPOSED TO HEAT MAY EXPLODE. CONTACT WITH STRONG OXIDIZERS MAY CAUSE FIRE. TOXIC GASES PRODUCED OXIDES OF SILICON, CARBON MONOXIDE, CARBON DIOXIDE ------------------------------------------------------------------------------ 5 - HEALTH HAZARD DATA ------------------------------------------------------------------------------ CARCINOGENICITY: NTP: NO IARC: NO Z LIST: NO OSHA REG: NO EFFECTS OF OVEREXPOSURE LIQUID MAY BE IRRITATING TO SKIN AND EYES. INHALATION OF VAPORS MAY CAUSE HEADACHE, NAUSEA, DIZZINESS, FATIGUE AND WEAKNESS IN ARMS AND LEGS. TARGET ORGANS NONE IDENTIFIED MEDICAL CONDITIONS GENERALLY AGGRAVATED BY EXPOSURE NONE IDENTIFIED ROUTES OF ENTRY ------------------------------------------------------------------------------ MSDS for TETRAMETHYLSILANE Page 3 ------------------------------------------------------------------------------ INHALATION, SKIN CONTACT, EYE CONTACT EMERGENCY AND FIRST AID PROCEDURES CALL A PHYSICIAN. IF SWALLOWED, IF CONSCIOUS, IMMEDIATELY INDUCE VOMITING. IF INHALED, REMOVE TO FRESH AIR. IF NOT BREATHING, GIVE ARTIFICIAL RESPIRATION. IF BREATHING IS DIFFICULT, GIVE OXYGEN. IN CASE OF CONTACT, IMMEDIATELY FLUSH EYES WITH PLENTY OF WATER FOR AT LEAST 15 MINUTES. FLUSH SKIN WITH WATER. ------------------------------------------------------------------------------ 6 - REACTIVITY DATA ------------------------------------------------------------------------------ STABILITY: STABLE HAZARDOUS POLYMERIZATION: WILL NOT OCCUR CONDITIONS TO AVOID: HEAT, FLAME, OTHER SOURCES OF IGNITION INCOMPATIBLES: STRONG OXIDIZING AGENTS DECOMPOSITION PRODUCTS: OXIDES OF SILICON, CARBON MONOXIDE, CARBON DIOXIDE ------------------------------------------------------------------------------ 7 - SPILL AND DISPOSAL PROCEDURES ------------------------------------------------------------------------------ STEPS TO BE TAKEN IN THE EVENT OF A SPILL OR DISCHARGE WEAR SELF-CONTAINED BREATHING APPARATUS AND FULL PROTECTIVE CLOTHING. SHUT OFF IGNITION SOURCES; NO FLARES, SMOKING OR FLAMES IN AREA. STOP LEAK IF YOU CAN DO SO WITHOUT RISK. USE WATER SPRAY TO REDUCE VAPORS. TAKE UP WITH SAND OR OTHER NON-COMBUSTIBLE ABSORBENT MATERIAL AND PLACE INTO CONTAINER FOR LATER DISPOSAL. FLUSH AREA WITH WATER. J. T. BAKER SOLUSORB(R) SOLVENT ADSORBENT IS RECOMMENDED FOR SPILLS OF THIS PRODUCT. DISPOSAL PROCEDURE DISPOSE IN ACCORDANCE WITH ALL APPLICABLE FEDERAL, STATE, AND LOCAL ENVIRONMENTAL REGULATIONS. EPA HAZARDOUS WASTE NUMBER: D001 (IGNITABLE WASTE) ------------------------------------------------------------------------------ 8 - PROTECTIVE EQUIPMENT ------------------------------------------------------------------------------ VENTILATION: USE ADEQUATE GENERAL OR LOCAL EXHAUST VENTILATION TO KEEP VAPOR AND MIST LEVELS AS LOW AS POSSIBLE. RESPIRATORY PROTECTION: NONE REQUIRED WHERE ADEQUATE VENTILATION CONDITIONS EXIST. IF AIRBORNE CONCENTRATION IS HIGH, A CHEMICAL CARTRIDGE RESPIRATOR WITH ORGANIC VAPOR CARTRIDGE IS RECOMMENDED. IF CONCENTRATION EXCEEDS CAPACITY OF CARTRIDGE RESPIRATOR, A SELF- CONTAINED BREATHING APPARATUS IS ADVISED. EYE/SKIN PROTECTION: SAFETY GOGGLES, UNIFORM, APRON, RUBBER GLOVES ARE ------------------------------------------------------------------------------ MSDS for TETRAMETHYLSILANE Page 4 ------------------------------------------------------------------------------ RECOMMENDED. ------------------------------------------------------------------------------ 9 - STORAGE AND HANDLING PRECAUTIONS ------------------------------------------------------------------------------ SAF-T-DATA(TM) STORAGE COLOR CODE: RED (FLAMMABLE) SPECIAL PRECAUTIONS KEEP CONTAINER TIGHTLY CLOSED. STORE IN EXPLOSION-PROOF REFRIGERATOR. ------------------------------------------------------------------------------ 10 - TRANSPORTATION DATA AND ADDITIONAL INFORMATION ------------------------------------------------------------------------------ DOMESTIC (D.O.T.) PROPER SHIPPING NAME FLAMMABLE LIQUID, N.O.S. (TETRAMETHYLSILANE) HAZARD CLASS FLAMMABLE LIQUID UN/NA UN1993 LABELS FLAMMABLE LIQUID INTERNATIONAL (I.M.O.) PROPER SHIPPING NAME FLAMMABLE LIQUIDS, N.O.S. (TETRAMETHYLSILANE) HAZARD CLASS 3.1 UN/NA UN2749 LABELS FLAMMABLE LIQUID