------------------------------------------------------------------------------ MSDS for BUFFERED OXIDE ETCH Page 1 ------------------------------------------------------------------------------ ------------------------------------------------------------------------------ 1 - PRODUCT IDENTIFICATION ------------------------------------------------------------------------------ PRODUCT NAME: BUFFERED OXIDE ETCH FORMULA: FORMULA WT: .00 CAS NO.: - - COMMON SYNONYMS: AQUEOUS NH4-HF ETCHANT SOLNS. PRODUCT CODES: 5326,5419,5359,5418,5324,5098,5332,5417,5334,5439,5192,5361 5320,5363,1178,5315,5173,5360,5360,5323,5109,5364,5175,5362 5338 EFFECTIVE: 12/08/86 REVISION #02 PRECAUTIONARY LABELLING BAKER SAF-T-DATA(TM) SYSTEM HEALTH - 4 EXTREME (POISON) FLAMMABILITY - 0 NONE REACTIVITY - 2 MODERATE CONTACT - 4 EXTREME (CORROSIVE) HAZARD RATINGS ARE 0 TO 4 (0 = NO HAZARD; 4 = EXTREME HAZARD). LABORATORY PROTECTIVE EQUIPMENT GOGGLES & SHIELD; LAB COAT & APRON; VENT HOOD; PROPER GLOVES PRECAUTIONARY LABEL STATEMENTS POISON DANGER MAY BE FATAL IF SWALLOWED REACTS VIOLENTLY WITH WATER, LIBERATING EXCESSIVE HEAT EXTREMELY HAZARDOUS LIQUID AND VAPOR CAUSES SEVERE BURNS WHICH MAY NOT BE IMMEDIATELY PAINFUL OR VISIBLE EXCEPTIONAL HEALTH AND CONTACT HAZARDS - READ MATERIAL SAFETY DATA SHEET DO NOT GET IN EYES, ON SKIN, ON CLOTHING. DO NOT BREATHE VAPOR. KEEP IN TIGHTLY CLOSED CONTAINER. USE WITH ADEQUATE VENTILATION. WASH THOROUGHLY AFTER HANDLING. KEEP CONTAINERS OUT OF SUN AND AWAY FROM HEAT. IN CASE OF SPILL, NEUTRALIZE SPILL WITH SODA ASH OR LIME. WITH CLEAN SHOVEL, CAREFULLY PLACE MATERIAL INTO CLEAN, DRY CONTAINER. FLUSH SPILL AREA WITH WATER. SAF-T-DATA(TM) STORAGE COLOR CODE: WHITE (CORROSIVE) ------------------------------------------------------------------------------ 2 - HAZARDOUS COMPONENTS ------------------------------------------------------------------------------ COMPONENT % CAS NO. AMMONIUM FLUORIDE 2-20 12125-01-8 HYDROFLUORIC ACID 0-1 7664-39-3 ------------------------------------------------------------------------------ MSDS for BUFFERED OXIDE ETCH Page 2 ------------------------------------------------------------------------------ ------------------------------------------------------------------------------ 3 - PHYSICAL DATA ------------------------------------------------------------------------------ BOILING POINT: N/A VAPOR PRESSURE(MM HG): N/A MELTING POINT: 18 C ( 64 F) VAPOR DENSITY(AIR=1): N/A SPECIFIC GRAVITY: 1.10 EVAPORATION RATE: N/A (H2O=1) (BUTYL ACETATE=1) SOLUBILITY(H2O): COMPLETE (IN ALL PROPORTIONS) % VOLATILES BY VOLUME: 80 APPEARANCE & ODOR: COLORLESS SOLUTION. ------------------------------------------------------------------------------ 4 - FIRE AND EXPLOSION HAZARD DATA ------------------------------------------------------------------------------ FLASH POINT (CLOSED CUP: N/A FLAMMABLE LIMITS: UPPER - N/A % LOWER - N/A % FIRE EXTINGUISHING MEDIA USE EXTINGUISHING MEDIA APPROPRIATE FOR SURROUNDING FIRE. SPECIAL FIRE-FIGHTING PROCEDURES FIREFIGHTERS SHOULD WEAR PROPER PROTECTIVE EQUIPMENT AND SELF-CONTAINED BREATHING APPARATUS WITH FULL FACEPIECE OPERATED IN POSITIVE PRESSURE MODE. MOVE CONTAINERS FROM FIRE AREA IF IT CAN BE DONE WITHOUT RISK. USE WATER TO KEEP FIRE-EXPOSED CONTAINERS COOL. TOXIC GASES PRODUCED HYDROGEN FLUORIDE, AMMONIA, NITROGEN OXIDES ------------------------------------------------------------------------------ 5 - HEALTH HAZARD DATA ------------------------------------------------------------------------------ TLV, STEL, PEL, TOXICITY RESULTS, AND HEALTH EFFECTS ARE LISTED FOR HYDROGEN FLUORIDE. THRESHOLD LIMIT VALUE (TLV/TWA): 2.5 MG/M3 ( 3 PPM) PERMISSIBLE EXPOSURE LIMIT (PEL): MG/M3 ( 3 PPM) TOXICITY: LC50 (INHL-MOUSE-1H) (PPM) - 456 LC50 (INHL-RAT-1H) (PPM) - 1276 CARCINOGENICITY: NTP: NO IARC: NO Z LIST: NO OSHA REG: NO EFFECTS OF OVEREXPOSURE VAPORS MAY BE IRRITATING TO SKIN, EYES, AND MUCOUS MEMBRANES. INHALATION OF VAPORS MAY CAUSE SEVERE IRRITATION OR BURNS OF THE RESPIRATORY SYSTEM, PULMONARY EDEMA, OR LUNG INFLAMMATION. LIQUID AND VAPOR CAUSE SEVERE BURNS WHICH MAY NOT BE IMMEDIATELY PAINFUL OR ------------------------------------------------------------------------------ MSDS for BUFFERED OXIDE ETCH Page 3 ------------------------------------------------------------------------------ VISIBLE. SUBSTANCE IS READILY ABSORBED THROUGH SKIN, PENETRATING SKIN TO ATTACK UNDERLYING TISSUES AND BONE. INGESTION MAY CAUSE SEVERE BURNS TO MOUTH, THROAT, AND STOMACH. MAY HAVE ADVERSE EFFECT ON KIDNEY FUNCTION AND MAY BE FATAL. CHRONIC EFFECTS OF EXPOSURE MAY INCLUDE HYPOCALCEMIA, BONE AND JOINT CHANGES. TARGET ORGANS EYES, SKIN MEDICAL CONDITIONS GENERALLY AGGRAVATED BY EXPOSURE NONE IDENTIFIED ROUTES OF ENTRY EYE CONTACT, SKIN CONTACT, INGESTION, INHALATION, ABSORPTION EMERGENCY AND FIRST AID PROCEDURES CALL A PHYSICIAN. IF SWALLOWED, DO NOT INDUCE VOMITING; IF CONSCIOUS, GIVE WATER, MILK, OR MILK OF MAGNESIA. IF INHALED, REMOVE TO FRESH AIR. IF NOT BREATHING, GIVE ARTIFICIAL RESPIRATION. IF BREATHING IS DIFFICULT, GIVE OXYGEN. FOR ACID IN THE EYES 1. IRRIGATE EYES FOR AT LEAST 15 MINUTES WITH COPIOUS QUANTITIES OF WATER, KEEPING EYELIDS APART AND AWAY FROM EYEBALLS DURING IRRIGATION. 2. GET COMPETENT MEDICAL ATTENTION IMMEDIATELY, PREFERABLY AN EYE SPECIALIST. 3. IF A PHYSICIAN IS NOT IMMEDIATELY AVAILABLE, APPLY ONE OR TWO DROPS OF 0.5% PONTOCAINE HYDROCHLORIDE* SOLUTION FOLLOWED BY A SECOND IRRIGATION FOR 15 MINUTES. USE NONE OF THE SOLUTIONS DESCRIBED FOR SKIN TREATMENT. USE NO OILS OR GREASES UNLESS INSTRUCTED TO DO SO BY A PHYSICIAN. * PONTOCAINE HYDORCHLORIDE IS A TRADE NAME FOR TETRACAINE HYDROCHLORIDE, MERCK INDEX MONOGRAPH 8904, SOLD BY WINTHROP LABORATORIES, N.Y.C. FOR ACID BURNS TO THE BODY 1. REMOVE THE VICTIM FROM THE CONTAMINATED AREA AND IMMEDIATELY PLACE HIM UNDER A SAFETY SHOWER OR WASH HIM WITH A WATER HOSE, WHICHEVER IS AVAILABLE. 2. REMOVE ALL CONTAMINATED CLOTHING. 3. KEEP WASHING WITH LARGE AMOUNTS OF WATER FOR MINIMUM OF 15 TO 20 MINUTES. 4. HAVE SOMEONE MAKE ARRANGEMENTS FOR MEDICAL ATTENTION WHILE YOU CONTINUE FLUSHING THE AFFECTED AREA WITH WATER. 5. A) IF AVAILABLE, AFTER THOROUGH WASHING, THE BURNED AREA SHOULD BE IMMERSED IN A SOLUTION OF 0.2% ICED AQUEOUS HYAMINE 1622 ** OR 0.13% ICED AQUEOUS ZEPHIRAN CHLORIDE ***. IF IMMERSION IS NOT PRACTICAL, TOWELS SHOULD BE SOAKED WITH ONE OF THE ABOVE SOLUTIONS AND USED AS COMPRESSES FOR THE BURNED AREA. IDEALLY COMPRESSES SHOULD BE CHANGED EVERY 2 MINUTES. 5. B) AN ALTERNATIVE TREATMENT TO 5A IS FOR THE PHYSICIAN TO INJECT STERILE 10% AQUEOUS CALCIUM GLUCONATE SOLUTION SUBCUTANEOUSLY BENEATH, AROUND, AND IN THE BURNED AREA. INITIALLY USE NO MORE THAN 0.5 CC PER SQUARE CENTIMETER AND DO NOT DISTORT APPEARANCE OF SKIN. IF PAIN IS NOT COMPLETELY RELIEVED, ADDITIONAL TREATMENT IS INDICATED. ------------------------------------------------------------------------------ MSDS for BUFFERED OXIDE ETCH Page 4 ------------------------------------------------------------------------------ 6. SEEK MEDICAL ATTENTION AS SOON AS POSSIBLE FOR ALL BURNS REGARDLESS OF HOW MINOR THEY MAY APPEAR INITIALLY. **HYAMINE 1622 IS A TRADE NAME FOR TETRACAINE BENZETHONIUM CHLORIDE, MERCK INDEX MONOGRAPH 1078, A QUATERNARY AMMONIUM COMPOUND SOLD BY ROHM HAAS, PHILADELPHIA. ***ZEPHIRAN CHLORIDE IS A TRADE NAME FOR BENZALKONIUM CHLORIDE, MERCK INDEX MONOGRAPH 1059, ALSO A QUATERNARY AMMONIUM COMPOUND, SOLD BY WINTHROP LABORATORIES, N.Y.C. TLV LISTED DENOTES CEILING LIMIT. ------------------------------------------------------------------------------ 6 - REACTIVITY DATA ------------------------------------------------------------------------------ STABILITY: STABLE HAZARDOUS POLYMERIZATION: WILL NOT OCCUR CONDITIONS TO AVOID: COLD, LIGHT, HEAT INCOMPATIBLES: ALKALIES, ORGANIC MATERIALS, MOST COMMON METALS, RUBBER, LEATHER, FLUORINE, STRONG BASES, CARBONATES, SULFIDES, CYANIDES, OXIDES OF SILICON, ESP. GLASS, CONCRETE, SILICA DECOMPOSITION PRODUCTS: HYDROGEN FLUORIDE, AMMONIA, OXIDES OF NITROGEN ------------------------------------------------------------------------------ 7 - SPILL AND DISPOSAL PROCEDURES ------------------------------------------------------------------------------ STEPS TO BE TAKEN IN THE EVENT OF A SPILL OR DISCHARGE WEAR SELF-CONTAINED BREATHING APPARATUS AND FULL PROTECTIVE CLOTHING. STOP LEAK IF YOU CAN DO SO WITHOUT RISK. VENTILATE AREA. NEUTRALIZE SPILL WITH SODA ASH OR LIME. WITH CLEAN SHOVEL, CAREFULLY PLACE MATERIAL INTO CLEAN, DRY CONTAINER AND COVER; REMOVE FROM AREA. FLUSH SPILL AREA WITH WATER. J. T. BAKER NEUTRASOL(R) "LOW NA+" ACID NEUTRALIZER IS RECOMMENDED FOR SPILLS OF THIS PRODUCT. DISPOSAL PROCEDURE DISPOSE IN ACCORDANCE WITH ALL APPLICABLE FEDERAL, STATE, AND LOCAL ENVIRONMENTAL REGULATIONS. EPA HAZARDOUS WASTE NUMBER: U134 (TOXIC WASTE) ------------------------------------------------------------------------------ 8 - PROTECTIVE EQUIPMENT ------------------------------------------------------------------------------ VENTILATION: USE GENERAL OR LOCAL EXHAUST VENTILATION TO MEET TLV REQUIREMENTS. RESPIRATORY PROTECTION: RESPIRATORY PROTECTION REQUIRED IF AIRBORNE CONCENTRATION EXCEEDS TLV. AT CONCENTRATIONS UP TO 20 PPM. A CHEMICAL CARTRIDGE RESPIRATOR WITH ACID/ORGANIC CARTRIDGE AND DUST/MIST FILTER IS RECOMMENDED. ABOVE THIS LEVEL, A SELF-CONTAINED ------------------------------------------------------------------------------ MSDS for BUFFERED OXIDE ETCH Page 5 ------------------------------------------------------------------------------ BREATHING APPARATUS IS RECOMMENDED. EYE/SKIN PROTECTION: SAFETY GOGGLES AND FACE SHIELD, UNIFORM, PROTECTIVE SUIT, NEOPRENE GLOVES ARE RECOMMENDED. ------------------------------------------------------------------------------ 9 - STORAGE AND HANDLING PRECAUTIONS ------------------------------------------------------------------------------ SAF-T-DATA(TM) STORAGE COLOR CODE: WHITE (CORROSIVE) SPECIAL PRECAUTIONS KEEP CONTAINER TIGHTLY CLOSED. STORE IN CORROSION-PROOF AREA. ISOLATE FROM INCOMPATIBLE MATERIALS. KEEP CONTAINERS OUT OF SUN AND AWAY FROM HEAT. PROTECT FROM FREEZING. HYDROFLUORIC ACID IS INCOMPATIBLE WITH GLASS AND ALL SILICON-BEARING MATERIALS AND SHOULD NEVER BE TRANSFERRED TO GLASS CONTAINERS. MATERIAL SHOULD REMAIN IN THE ORIGINAL POLYETHYLENE CONTAINER. UNLINED STEEL TANKS IN HYDROFLUORIC SERVICE ARE SUBJECT TO INDISCRIMINATE HYDROGEN BLISTERING AND SHOULD ROUTINELY BE INSPECTED AND REPAIRED. ------------------------------------------------------------------------------ 10 - TRANSPORTATION DATA AND ADDITIONAL INFORMATION ------------------------------------------------------------------------------ DOMESTIC (D.O.T.) PROPER SHIPPING NAME HYDROFLUORIC ACID, SOLUTION, MIXTURE HAZARD CLASS CORROSIVE MATERIAL (LIQUID) UN/NA UN1790 LABELS CORROSIVE REPORTABLE QUANTITY 5000 LBS. INTERNATIONAL (I.M.O.) PROPER SHIPPING NAME HYDROFLUORIC ACID, SOLUTION, MIXTURE HAZARD CLASS 8, 6.1 UN/NA UN1790 LABELS CORROSIVE, POISON