------------------------------------------------------------------------------ MSDS for HEXAMETHYLDISILAZANE Page 1 ------------------------------------------------------------------------------ ------------------------------------------------------------------------------ 1 - PRODUCT IDENTIFICATION ------------------------------------------------------------------------------ PRODUCT NAME: HEXAMETHYLDISILAZANE FORMULA: (CH3)3SINHSI(CH3)3 FORMULA WT: 161.40 CAS NO.: 999-97-3 NIOSH/RTECS NO.: JM9230000 COMMON SYNONYMS: HMDS PRODUCT CODES: 9352,5382,N152 EFFECTIVE: 11/05/86 REVISION #02 PRECAUTIONARY LABELLING BAKER SAF-T-DATA(TM) SYSTEM HEALTH - 2 MODERATE FLAMMABILITY - 4 EXTREME (FLAMMABLE) REACTIVITY - 2 MODERATE CONTACT - 3 SEVERE (CORROSIVE) HAZARD RATINGS ARE 0 TO 4 (0 = NO HAZARD; 4 = EXTREME HAZARD). LABORATORY PROTECTIVE EQUIPMENT GOGGLES & SHIELD; LAB COAT & APRON; VENT HOOD; PROPER GLOVES; CLASS B EXTINGUISHER PRECAUTIONARY LABEL STATEMENTS DANGER FLAMMABLE CAUSES BURNS HARMFUL IF SWALLOWED OR INHALED KEEP AWAY FROM HEAT, SPARKS, FLAME. DO NOT GET IN EYES, ON SKIN, ON CLOTHING. AVOID BREATHING VAPOR. KEEP IN TIGHTLY CLOSED CONTAINER. USE WITH ADEQUATE VENTILATION. WASH THOROUGHLY AFTER HANDLING. IN CASE OF FIRE, USE DRY CHEMICAL OR CARBON DIOXIDE. DO NOT USE WATER. IN CASE OF SPILL, SOAK UP WITH SAND OR EARTH. FLUSH SPILL AREA WITH WATER. SAF-T-DATA(TM) STORAGE COLOR CODE: RED STRIPE (STORE SEPARATELY) ------------------------------------------------------------------------------ 2 - HAZARDOUS COMPONENTS ------------------------------------------------------------------------------ COMPONENT % CAS NO. HEXAMETHYLDISILAZANE 90-100 999-97-3 ------------------------------------------------------------------------------ 3 - PHYSICAL DATA ------------------------------------------------------------------------------ BOILING POINT: 125 C ( 257 F) VAPOR PRESSURE(MM HG): 20 ------------------------------------------------------------------------------ MSDS for HEXAMETHYLDISILAZANE Page 2 ------------------------------------------------------------------------------ MELTING POINT: N/A VAPOR DENSITY(AIR=1): 4.6 SPECIFIC GRAVITY: 0.77 EVAPORATION RATE: N/A (H2O=1) (BUTYL ACETATE=1) SOLUBILITY(H2O): DECOMPOSES % VOLATILES BY VOLUME: 100 APPEARANCE & ODOR: COLORLESS LIQUID WITH AMMONIACAL ODOR. ------------------------------------------------------------------------------ 4 - FIRE AND EXPLOSION HAZARD DATA ------------------------------------------------------------------------------ FLASH POINT (CLOSED CUP 23 C ( 73 F) FLAMMABLE LIMITS: UPPER - 16.3 % LOWER - 0.8 % FIRE EXTINGUISHING MEDIA USE DRY CHEMICAL OR CARBON DIOXIDE. DO NOT USE WATER. SPECIAL FIRE-FIGHTING PROCEDURES FIREFIGHTERS SHOULD WEAR PROPER PROTECTIVE EQUIPMENT AND SELF-CONTAINED BREATHING APPARATUS WITH FULL FACEPIECE OPERATED IN POSITIVE PRESSURE MODE. MOVE EXPOSED CONTAINERS FROM FIRE AREA IF IT CAN BE DONE WITHOUT RISK. USE WATER TO KEEP FIRE-EXPOSED CONTAINERS COOL; DO NOT GET WATER INSIDE CONTAINERS. UNUSUAL FIRE & EXPLOSION HAZARDS VAPORS MAY FLOW ALONG SURFACES TO DISTANT IGNITION SOURCES AND FLASH BACK. CLOSED CONTAINERS EXPOSED TO HEAT MAY EXPLODE. CONTACT WITH STRONG OXIDIZERS MAY CAUSE FIRE. TOXIC GASES PRODUCED CARBON MONOXIDE, CARBON DIOXIDE, NITROGEN OXIDES, AMMONIA, FORMALDEHYDE ------------------------------------------------------------------------------ 5 - HEALTH HAZARD DATA ------------------------------------------------------------------------------ TOXICITY: LDLO (IPR-MOUSE)(MG/KG) - 650 CARCINOGENICITY: NTP: NO IARC: NO Z LIST: NO OSHA REG: NO EFFECTS OF OVEREXPOSURE VAPORS MAY BE IRRITATING TO SKIN, EYES, AND MUCOUS MEMBRANES. INHALATION OF VAPORS MAY CAUSE PULMONARY EDEMA. INHALATION OF EXCESSIVE AMOUNTS OF VAPORS MAY CAUSE DEPRESSION, DIZZINESS, CONFUSION OR COLLAPSE. CONTACT WITH SKIN HAS A DEFATTING EFFECT, CAUSING DRYING AND IRRITATION. LIQUID MAY CAUSE BURNS TO SKIN AND EYES. INGESTION MAY CAUSE NAUSEA, VOMITING, GASTROINTESTINAL IRRITATION, AND BURNS TO MOUTH AND THROAT. TARGET ORGANS EYES, SKIN ------------------------------------------------------------------------------ MSDS for HEXAMETHYLDISILAZANE Page 3 ------------------------------------------------------------------------------ MEDICAL CONDITIONS GENERALLY AGGRAVATED BY EXPOSURE NONE IDENTIFIED ROUTES OF ENTRY EYE CONTACT, SKIN CONTACT, INHALATION, INGESTION EMERGENCY AND FIRST AID PROCEDURES CALL A PHYSICIAN. IF SWALLOWED, DO NOT INDUCE VOMITING; IF CONSCIOUS, GIVE LARGE AMOUNTS OF WATER. FOLLOW WITH DILUTED VINEGAR, FRUIT JUICE OR WHITES OF EGGS, BEATEN WITH WATER. IF INHALED, REMOVE TO FRESH AIR. IF NOT BREATHING, GIVE ARTIFICIAL RESPIRATION. IF BREATHING IS DIFFICULT, GIVE OXYGEN. IN CASE OF CONTACT, IMMEDIATELY FLUSH EYES OR SKIN WITH PLENTY OF WATER FOR AT LEAST 15 MINUTES WHILE REMOVING CONTAMINATED CLOTHING AND SHOES. WASH CLOTHING BEFORE RE-USE. ------------------------------------------------------------------------------ 6 - REACTIVITY DATA ------------------------------------------------------------------------------ STABILITY: STABLE HAZARDOUS POLYMERIZATION: WILL NOT OCCUR CONDITIONS TO AVOID: HEAT, FLAME, OTHER SOURCES OF IGNITION, MOISTURE, AIR INCOMPATIBLES: STRONG OXIDIZING AGENTS, STRONG ACIDS, WATER, ALCOHOLS DECOMPOSITION PRODUCTS: AMMONIA, CARBON MONOXIDE, CARBON DIOXIDE, OXIDES OF NITROGEN, FORMALDEHYDE ------------------------------------------------------------------------------ 7 - SPILL AND DISPOSAL PROCEDURES ------------------------------------------------------------------------------ STEPS TO BE TAKEN IN THE EVENT OF A SPILL OR DISCHARGE WEAR SELF-CONTAINED BREATHING APPARATUS AND FULL PROTECTIVE CLOTHING. SHUT OFF IGNITION SOURCES; NO FLARES, SMOKING, OR FLAMES IN AREA. STOP LEAK IF YOU CAN DO SO WITHOUT RISK. DO NOT USE WATER. TAKE UP WITH SAND OR OTHER NON-COMBUSTIBLE ABSORBENT MATERIAL AND PLACE INTO CONTAINER FOR LATER DISPOSAL. FLUSH SPILL AREA WITH WATER. J. T. BAKER SOLUSORB(R) SOLVENT ADSORBENT IS RECOMMENDED FOR SPILLS OF THIS PRODUCT. DISPOSAL PROCEDURE DISPOSE IN ACCORDANCE WITH ALL APPLICABLE FEDERAL, STATE, AND LOCAL ENVIRONMENTAL REGULATIONS. EPA HAZARDOUS WASTE NUMBER: D001,D002,D003(IGNITABLE,CORROSIVE,REACTIVE ------------------------------------------------------------------------------ 8 - PROTECTIVE EQUIPMENT ------------------------------------------------------------------------------ VENTILATION: USE ADEQUATE GENERAL OR LOCAL EXHAUST VENTILATION TO KEEP VAPOR AND MIST LEVELS AS LOW AS POSSIBLE. ------------------------------------------------------------------------------ MSDS for HEXAMETHYLDISILAZANE Page 4 ------------------------------------------------------------------------------ RESPIRATORY PROTECTION: NONE REQUIRED WHERE ADEQUATE VENTILATION CONDITIONS EXIST. IF AIRBORNE CONCENTRATION IS HIGH, A CHEMICAL CARTRIDGE RESPIRATOR WITH ORGANIC VAPOR CARTRIDGE IS RECOMMENDED. IF CONCENTRATION EXCEEDS CAPACITY OF CARTRIDGE RESPIRATOR, A SELF- CONTAINED BREATHING APPARATUS IS ADVISED. EYE/SKIN PROTECTION: SAFETY GOGGLES AND FACE SHIELD, UNIFORM, PROTECTIVE SUIT, RUBBER GLOVES ARE RECOMMENDED. ------------------------------------------------------------------------------ 9 - STORAGE AND HANDLING PRECAUTIONS ------------------------------------------------------------------------------ SAF-T-DATA(TM) STORAGE COLOR CODE: RED STRIPE (STORE SEPARATELY) SPECIAL PRECAUTIONS BOND AND GROUND CONTAINERS WHEN TRANSFERRING LIQUID. KEEP CONTAINER TIGHTLY CLOSED. STORE IN A COOL, DRY, WELL-VENTILATED, FLAMMABLE LIQUID STORAGE AREA. ISOLATE FROM INCOMPATIBLE MATERIALS. ------------------------------------------------------------------------------ 10 - TRANSPORTATION DATA AND ADDITIONAL INFORMATION ------------------------------------------------------------------------------ DOMESTIC (D.O.T.) PROPER SHIPPING NAME FLAMMABLE LIQUID, N.O.S. (HEXAMETHYLDISILAZANE) HAZARD CLASS FLAMMABLE LIQUID UN/NA UN1993 LABELS FLAMMABLE LIQUID INTERNATIONAL (I.M.O.) PROPER SHIPPING NAME FLAMMABLE LIQUIDS, N.O.S. (HEXAMETHYLDISILAZANE) HAZARD CLASS 3.3 UN/NA UN1993 LABELS FLAMMABLE LIQUID